File:First-scanner SVG-Lithography IEEE Milestone MIT LL Development of 193-nm Projection Photolithography.jpg

Size of this preview: 490 × 599 pixels. Other resolution: 860 × 1,051 pixels.

Original file ‎(860 × 1,051 pixels, file size: 579 KB, MIME type: image/jpeg)

Summary

The first full-field step-and-scan 193-nm lithography system. Built by SVG Lithography and installed in Lincoln Laboratory's cleanroom facilities.

Click on a date/time to view the file as it appeared at that time.

	Date/Time	Thumbnail	Dimensions	User	Comment
current	21:40, 25 April 2022		860 × 1,051 (579 KB)	Joe Campbell (talk \| contribs)	Original photo.
	18:37, 21 April 2022		550 × 358 (32 KB)	Joe Campbell (talk \| contribs)	The first full-field step-and-scan 193-nm lithography system. Built by SVG Lithography and installed in Lincoln Laboratory's cleanroom facilities.

You cannot overwrite this file.

The following 2 pages use this file:

This file contains additional information, probably added from the digital camera or scanner used to create or digitize it.

If the file has been modified from its original state, some details may not fully reflect the modified file.

Date and time of data generation	12:09, 29 October 2008
Width	860 px
Height	1,051 px
Bits per component	8 8 8
Pixel composition	RGB
Orientation	Normal
Number of components	3
Horizontal resolution	72 dpi
Vertical resolution	72 dpi
Software used	Adobe Photoshop 21.2 (Windows)
File change date and time	12:10, 25 April 2022
Y and C positioning	65535
Exif version	2.31
Color space	Uncalibrated
Date metadata was last modified	08:10, 25 April 2022
Date and time of digitizing	08:08, 25 April 2022
Unique ID of original document	1BEE174B7B2958897105B4FB9AA0ED52
Short title	234455-1C
IIM version	4