Edit Proposal: Milestone-Proposal:First Practical Field Emission Electron Microscope, 1972-1984 You do not have permission to edit this page, for the following reason: You are not currently logged in. The action you have requested is limited to users in the group: Users. Please log in or create an account. Docket ID: (admins only) Thank you for proposing a technical achievement for possible recognition as an IEEE Milestone in Electrical Engineering and Computing. Your efforts help preserve the heritage of technology. Detailed information on the Milestone application process may be found at: Milestone Guidelines and How to Propose a Milestone. At least one of the proposer(s) must be an IEEE Member (including Student Member) in good standing. To the proposer’s knowledge, is this achievement subject to litigation? If the answer is "yes", the proposal cannot proceed further. None Yes No You must be able to answer "yes" to all of the following questions. 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A museum where a device or example of the technology is displayed, or the university where the inventor studied, are not, in themselves, sufficient connection for a milestone plaque. Also, please Describe briefly the intended site(s) of the milestone plaque(s). (e.g. Is it corporate buildings? Historic Site? Residential? Are there other historical markers already at the site?) Are the original buildings extant? Please provide the details of the mounting, i.e. on the outside of the building, in the ground floor entrance hall, on a plinth on the grounds, etc. How is the intended plaque site protected/secured, and in what ways is it accessible to the public? If visitors to the plaque site will need to go through security, or make an appointment, please give details as well as the contact information visitors will need in order to arrange to visit the plaque. Who is the present owner of the site(s)? In the space below, please describe in detail: the historic significance of the achievement, its importance to the evolution of electrical and computer engineering and science, its importance to regional/national/international development, its benefits to humanity, the ways the achievement was a significant advance rather than an incremental improvement of existing technology. The material submitted here will constitute the main descriptive article on the ETHW website for readers to learn about the milestone. Space is unlimited, and detail is encouraged. Most milestones require 1000 to 1500 words of support, however there is no word limit. The article should be readable by a wide audience that includes practicing engineers, scholars of history, and the general public. Some examples of the text of good milestone articles are First Radio Astronomical Observations Using Very Long Baseline Interferometry] and G3_Facsimile International Standardization of G3 Facsimile (Do not worry about the formatting of the page, IEEE History Center Staff will do that afterwards.) What is the historical significance of the work (its technological, scientific, or social importance)? First Practical Field Emission Technology and its Application to High Resolution Electron Microscopes, 1972–1984 Hitachi is a pioneer in electron microscopes, which it first started research and development in 1940, and has developed many electron microscopes. Its microscopes, beginning from the first made-in-Japan commercial electron microscope in 1942, have been highly evaluated from early on, for example the grand prize at the Brussels International Exposition in 1958. In the mid-1960's, Dr. A. V. Crewe (The University of Chicago) developed a field emission (FE) electron source and reported that an early version of an FE scanning transmission electron microscope (FE-STEM) succeeded to observe individual atoms. Hitachi collaborated with Dr. Crewe in the development of a practical FE electron microscope. After many years of fundamental research and development of FE stability technology, Hitachi constructed the world’s first commercial high-resolution FE-SEM (field-emission scanning electron microscope) in 1972. The FE-SEM brought about an innovative improvement in image resolution, from 15 nm to 3 nm. Its first application was to biology, which resulted in the first high-resolution observation of bacteriophages. The application of an enhanced in-lens electron optics design enabled ultra-high-resolution imaging of sub nanometers, which led to the first observation of the AIDS virus and more detailed images of bacteriophages by Professor Tanaka (Tottori University). Subsequent advances in technology resulted in current FE-SEMs having greatly improved resolution, i.e., 0.4 nm in the secondary electron image. The FE electron source was also applied to a transmission electron microscope (TEM) and a scanning transmission electron microscope (STEM). In physics, the application of an FE electron source with high interference characteristics to an FE-TEM developed for electron beam holography resulted in greatly improved coherency, i.e., from 300 to as many as 3000 lines of Fresnel fringes. The FE-TEM electron beam holography experimentally proved the Aharonov-Bohm effect in 1982, which confirmed the existence of gauge field and put an end to the vector-potential controversy. In the semiconductor industry, the critical-dimension SEM (CD-SEM), i.e., an FE-SEM dedicated to semiconductor-device micro-pattern in-line measurement, was commercialized in 1984. The CD-SEM is suitable for measuring non-conductive semiconductor devices without charge-up. Application of the Schottky electron source, an FE electron source proposed by Dr. Swanson in the 1980's, enabled long-term, stable and reliable CD-SEM operation, which is required for semiconductor production lines. CD-SEMs have been contributing to “scaling” as an indispensable metrology tool for device fabrication. Development of FE electron source technology enabled ultra-high-resolution imaging with stability and reliability. FE electron microscopes, i.e., FE-SEMs, FE-TEMs, FE-STEMs, and CD-SEMs, are now widely used for advanced research and development in many fields of science, technology, and industry, including physics, biotechnology, medical science, materials, and semiconductors. What obstacles (technical, political, geographic) needed to be overcome? For FE emission current stability, a steady-state ultra-high vacuum of 10^−8 Pa was necessary since residual gas molecules cause the FE emission current to fluctuate. This is a much higher vacuum than that of a conventional thermionic emission electron source (order of magnitude of 10^−4 Pa). Moreover, maintaining an ultra high vacuum under electron beam emission conditions is quite a challenge because the electron beam stimulates outgassing from the anode, which degrades the vacuum. Hitachi succeeded in establishing an ultra-high vacuum technology for the FE electron source. Patented What features set this work apart from similar achievements? The FE electrons are obtained by applying a high voltage (several thousand volts) to the tip of a metal needle (FE tip) with a radius of less than 100 nm. Application of a high electric field to the tip extracts electrons from the top of the tip due to the tunnel effect, whereas heating of the tungsten filament in a conventional thermionic emission source extracts thermionic electrons. Because of the high electric field, the FE electron current density (10^4–10^6 A/cm2) is three orders of magnitude larger than that of thermionic electrons (1–10 A/cm2). An FE electron source is ideally a point source, and the diameter of the virtual source ranges from 5 to 10 nm, which is 1/1000 the source size of thermionic emission (1–10 mm). The energy spread of FE electrons is 0.2–0.3 eV, which is much narrower than that of thermionic emission (2 eV). As a result, an FE electron source has 1000× the brightness, 1/1000 the source size, and 1/10 the energy spread of a conventional thermionic emission source. These features of the FE electron source result in much brighter and higher resolution images and high interference characteristics when applied to SEMs, TEMs, STEMs, and CD-SEMs. However, the instability of the FE emission current was an essential difficulty in the development of a practical FE electron microscope. After many years of fundamental research and development of FE electron source stability technology, Hitachi finally achieved a commercial FE-SEM featuring a stable and reliable FE electron source. Supporting texts and citations to establish the dates, location, and importance of the achievement. You must supply the texts or excerpts themselves, not just the references. Minimum of five (5), but as many as needed to support the milestone, such as patents, contemporary newspaper articles, journal articles, or chapters in scholarly books. At least one of the references must be from a scholarly book or journal article. 'Scholarly' is defined as peer-reviewed, with references, and published. The full reference, in English, must be uploaded, not just the citation. See below section for details on uploading material to the website. All supporting materials must be in English, or accompanied by an English translation. Supporting materials (supported formats: GIF, JPEG, PNG, PDF, DOC) which can be made publicly available on the IEEE History Center’s website (i.e. unencumbered by copyright, or with the copyright holder’s permission). All supporting materials must be in English, or if not in English, accompanied by an English translation. You must supply the texts or excerpts themselves, not just the references. Images and photographs are especially appreciated, however, it is necessary that you list the copyright owner for these and obtain the copyright owner’s permission to reuse. For documents that are copyright-encumbered, or which you do not have rights to post, email the documents themselves to email@example.com. Please see the Milestone Program Guidelines for more information. To add attachments, first upload the file and add by adding the text: [[Media:(filename)]] For example, if the file you uploaded was named "Milestone Reference.pdf", include the text: [[Media:Milestone Reference.pdf]] in the appropriate field. Please email a jpeg or PDF a letter in English, or with English translation, from the site owner(s) giving permission to place IEEE milestone plaque on the property, and a letter (or forwarded email) from the appropriate Section Chair supporting the Milestone application to firstname.lastname@example.org with the subject line "Attention: Milestone Administrator." Note that there are multiple texts of the letter depending on whether an IEEE organizational unit other than the section will be paying for the plaque(s). Submit this proposal to the IEEE History Committee for review. Only check this when the proposal is finished Summary: This is a minor edit Watch this page Cancel Retrieved from "http://ieeemilestones.ethw.org/Milestone-Proposal:First_Practical_Field_Emission_Electron_Microscope,_1972-1984"